Dark-field electron holography as a recording of crystal diffraction in real space: a comparative study with high-resolution X-ray diffraction for strain analysis of MOSFETs
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D. B. Cunff | D. Benoit | A. Claverie | M. Hÿtch | D. Rouchon | M. Wormington | P. Gergaud | V. Boureau | A. Durand