论文信息 - Epitaxial growth of SrTiO3 films on CeO2/yttria-stabilized zirconia/Si(001) with TiO2 atomic layer by pulsed-laser deposition

Epitaxial growth of SrTiO3 films on CeO2/yttria-stabilized zirconia/Si(001) with TiO2 atomic layer by pulsed-laser deposition

Epitaxial SrTiO3 (STO) films were fabricated on CeO2/yttria-stabilized zirconia(YSZ)/Si(001) substrates by the insertion of a TiO2 atomic layer by pulsed-laser deposition. X-ray diffraction and reflection high-energy electron diffraction showed that epitaxial STO films with different out-of-plane orientations have been obtained by controlling the thickness of the TiO2 atomic layer. A stoichiometric STO film directly deposited on CeO2/YSZ/Si was preferentially (110) oriented with a STO[110]∥CeO2[100] epitaxial relationship. On the other hand, 1 monolayer (ML) TiO2-covered CeO2/YSZ/Si resulted in STO(001) film epitaxially growth with a STO[110]∥CeO2[100] relationship. However, as the TiO2 thickness exceeded 1 ML, the orientation of STO film drastically changed to (111) orientation having a STO[011]∥CeO2[100] epitaxial relationship. These results indicate that the atomic layer thickness dramatically controls the film epitaxial growth.

[1] H. Ishiwara,et al. Epitaxial Growth of SrTiO3 Films on Si(100) Substrates Using a Focused Electron Beam Evaporation Method , 1991 .

[2] T. Chikyow,et al. Anatase TiO2 thin films grown on lattice-matched LaAlO3 substrate by laser molecular-beam epitaxy , 2001 .

[3] J. Tanaka,et al. Anatase-Type TiO2 Thin Films Produced by Lattice Deformation , 1997 .

[4] S. Migita,et al. Epitaxial structure SrTiO3〈011〉 on Si〈001〉 , 2001 .

[5] N. Wakiya,et al. Effect of Yttria-Stabilized Zirconia Thickness on Crystal Structure and Electric Property of Epitaxial CeO2/Yttria-Stabilized Zirconia Buffer Layer in Metal/Ferroelectric/Insulator/Semiconductor Structure , 2001 .

[6] M. Varela,et al. Epitaxial growth of SrTiO_3 (00h), (0hh), and (hhh) thin films on buffered Si(001) , 1998 .

[7] H. Ishiwara,et al. Roles of Buffer Layers in Epitaxial Growth of SrTiO3 Films on Silicon Substrates , 1994 .

[8] Masashi Kawasaki,et al. Combinatorial synthesis and high-throughput evaluation of doped TiO2 thin films for the development of photocatalysts , 2000, OPTO.

[9] N. Wakiya,et al. Growth Mechanism of SrTiO3 Thin Film on CeO2(001) Surface , 2002 .

[10] Alfonso Franciosi,et al. Ultrahigh vacuum metalorganic chemical vapor deposition growth and in situ characterization of epitaxial TiO2 films , 1993 .