Nanoantenna integrated thermomechanical infrared pixels

We investigated a nanoantenna integrated thermomechanical infrared pixel based on bi-material nanobeam. Three bilayer configurations are numerically studied and optimized towards maximum thermomechanical deflection. The integrated optical nanoantennae are geometrically tuned to reach the highest optical absorption at 6 μm. Thermal time constants and fundamental noise equivalent powers of the three bilayer configurations are also calculated. We also discuss the potential implementation of our detector as an infrared polarimetric sensor.

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