论文信息 - Sensitivity analysis of fitting for scatterometry

Sensitivity analysis of fitting for scatterometry

The sensitivity analysis of fitting (SAF) is a formalism that determines the type of measurements that yields optimum determination precision. SAF is applied to ellipsometric- scatterometry of surface relief gratings and for the optimum measurement configuration predicts a significant improvement compared to the conventional scatterometry measurement configurations. The SF predictions for precision are compared to actual values obtained experimentally, and a qualitative agreement is obtained. The discrepancies between theory and experiment are likely due to inaccurate modeling of the grating.

John R. McNeil | Petre-Catalin Logofatu | J. McNeil | P. Logofatu

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