나노 공정 개발을 위한 기계적 물성 측정 기법

There are many applications of nanostructures, have been suggested by lots of researchers. It is highly required to measure the properties of nano-sized materials for design and fabrication of the nanostructures. In this paper, several techniques for measuring the mechanical properties of nano-structures are presented laying emphasis on the activity of Nano Property Measurement Team in KIMM. Some advanced applications of nano-indenter are described for measuring elastic, visco-elastic, frictional and adhesive properties as well as the standard methods of it. Micro-tensile test technique with accurate in-plane strain measurement method is also presented and its role in the property measurement of nanostructures is discussed.