나노 공정 개발을 위한 기계적 물성 측정 기법
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There are many applications of nanostructures, have been suggested by lots of researchers. It is
highly required to measure the properties of nano-sized materials for design and fabrication of the
nanostructures. In this paper, several techniques for measuring the mechanical properties of
nano-structures are presented laying emphasis on the activity of Nano Property Measurement Team in
KIMM. Some advanced applications of nano-indenter are described for measuring elastic, visco-elastic,
frictional and adhesive properties as well as the standard methods of it. Micro-tensile test technique
with accurate in-plane strain measurement method is also presented and its role in the property
measurement of nanostructures is discussed.