论文信息 - NMOS contact engineering for CMOS scaling - 字舞流文

NMOS contact engineering for CMOS scaling

M. Chudzik | F. Khaja | Shashank Sharma | T. Henry | Xuebin Li | R. Hung | B. Wood | K. V. Rao | N. Variam | C. Ni | K. Shim