A novel quadrilinear CCD for high resolution line arrays

This paper presents a novel quadrilinear CCD, allowing both serial and parallel clocking with one set of busbars common to inner and outer registers on the same side of the array. This is made possible by the special organization of the charge transfer from inner to outer registers. Line arrays having 384, 808, 1728, and 3456 sensors have been fabricated successfully on a pitch of 8 µm; the sensor nonuniformity is less than ±5 percent and the transfer loss is 1.10-5in both inner and outer registers.