Young's modulus measurements of silicon nanostructures using a scanning probe system: a non-destructive evaluation approach
暂无分享,去创建一个
Ajay P. Malshe | Dinesh K. Sood | Kumar Virwani | William F. Schmidt | W. F. Schmidt | K. Virwani | A. Malshe | D. Sood
[1] W. Young,et al. Roark's formulas for stress and strain; seventh edition , 1989 .
[2] R. L. Edwards,et al. A new technique for measuring the mechanical properties of thin films , 1997 .
[3] J. Schweitz,et al. Micromechanical fracture strength of silicon , 1990 .
[4] R. Vinci,et al. Elastic and Anelastic Behavior of Materials in Small Dimensions , 2002 .
[5] M. Roukes,et al. Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals , 1996 .
[6] Y. Isono,et al. Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM , 2000, Journal of Microelectromechanical Systems.
[7] Peter Gumbsch,et al. Atomistic Aspects of Brittle Fracture , 2000 .
[8] Gottlieb S. Oehrlein,et al. Dry etching damage of silicon: A review , 1989 .
[9] C. J. Wilson,et al. Fracture testing of silicon microcantilever beams , 1996 .
[10] Ajay P. Malshe,et al. Fabrication and testing of nanomechanical <100> silicon beam structures using a scanning probe system , 2002, SPIE Micro + Nano Materials, Devices, and Applications.
[11] Michael L. Roukes,et al. Quantized thermal conductance: measurements in nanostructures , 2000 .
[12] S. Cunningham,et al. Mechanical behavior of structures for microelectromechanical systems , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[13] T. Ono,et al. Study on ultra-thin NEMS cantilevers - high yield fabrication and size-effect on Young's modulus of silicon , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).
[14] O. Tabata,et al. Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films , 1998 .
[15] Kukjin Chun,et al. A sticking model of suspended polysilicon microstructure including residual stress gradient and postrelease temperature , 1998 .
[16] T. Kenny,et al. Attonewton force detection using ultrathin silicon cantilevers , 1997 .