Testing and improvement of micro-optical-switch dynamics

Abstract The experimental and theoretical investigations presented in this paper have been performed on a micro-opto-electro-mechanical switch developed for switching and attenuation of light in optical fibers. It is demonstrated that high-speed cine photomicrography together with model-based evaluation of the image sequences is a powerful diagnostic tool for reliability testing of dynamic processes in micro-electro-mechanical systems.

[1]  P. Egelhaaf,et al.  Mikrosystemtechnik: Von der Forschung zu innovativen Produkten: Empfehlungen zur Innovationsförderung in der Mikrosystemtechnik , 1996 .

[2]  Friedrich Pfeiffer,et al.  Einführung in die Dynamik , 1992 .

[3]  Eberhard P. Hofer,et al.  Versatile microscope-coupled high-intensity pulsed light source for high-speed cine photomicrography of microactuators , 1997, Other Conferences.

[4]  Eberhard P. Hofer,et al.  High-speed visualization, a powerful diagnostic tool for microactuators – retrospect and prospect , 1999 .

[5]  J. Honour.  Electronic camera systems take the measure of high-speed events , 1994 .

[6]  Christian Rembe,et al.  Nonreproducible phenomena in thermal ink jets with real high-speed cine photomicrography , 1998, Other Conferences.

[7]  L. Segel,et al.  Mathematics Applied to Continuum Mechanics , 1977 .

[8]  R. C. Gutierrez,et al.  Pulsed-Source Interferometry for Characterization of Resonant Micromachined Structures , 1998 .

[9]  D. M. Freeman,et al.  Using a light microscope to measure motions with nanometer accuracy , 1998 .

[10]  Christian Rembe,et al.  Analysis of the dynamics in microactuators using high-speed cine photomicrography , 2001 .

[11]  Ulrike Wallrabe,et al.  Fully batch fabricated LIGA actuators integrated on piezoelectric ceramic substrates , 1998 .

[12]  Ulrike Wallrabe,et al.  Development of miniaturized piezoelectric actuators for optical applications realized using LIGA technology , 1999 .