论文信息 - Linnik Point Diffraction Interferometer Of Increased Sensitivity For The Measurement Of Wavefront Error

Linnik Point Diffraction Interferometer Of Increased Sensitivity For The Measurement Of Wavefront Error

The 1933 LINNIK Point Diffraction Interferometer continues to offer new possibilities in non-contacting aspheric grazing incidence mirror testing. In this work we demonstrate the wave-front aberration of a stigmatic Soft X-Ray reflecting optic recorded at progressively shorter wavelengths to a current limit of 313 nm yielding a twofold increase in sensitivity over previously reported measurements.

W. Harris | R. J. Speer | V. Stanley

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