Apparatus for detecting hazes of photomask surface and method for detecting thereof

The invention sikimyeo generate a haze (Haze) on the photomask surface, the present invention relates to haze detection apparatus and detection method capable of observing the phenomenon in real-time, with an excimer laser, which emits EUV high frequency beam, uniform beam, and an optical system that makes a certain size, and the energy detector for monitoring the energy intensity reaching the soil mask in real-time, the processing chamber for performing a haze detection system and haze generation and detection process to determine the haze generated or not, the device control and with the interface device that can determine the machine condition, the stage of controlling the photomask loading and position of the process chamber controller and the photomask surface optically image to determine in real time the status of the position and the photomask that beam reaches the computer vision systems that control, and overall system processing Characterized by consisting of a. Photomask, haze detection device