Depth Distributions of ESR Centers Induced in Fused Quartz by Gas-Discharges

E'- and Al/H-centers were found by ESR in fused quartz exposed to glow discharges of H2, Ar, N2 and N2O gases. They distribute to a depth of 5 mm. The following introduction mechanisms are inferred. The E'-center is induced by ion bombardment and by reaction of discharge-produced hydrogen ion or atom with surface oxygen. An excitation by UV-light enhances diffusion of E'. AN/H-center, exhibiting a hyperfine structure, is induced by an association of aluminum impurity with hydrogen liberated from coexisting OH groups by the UV-ionization. It is partially induced also by penetration of the discharge-produced hydrogen species into the fused quartz.