Development of a piezoelectric-driven miniature pump for biomedical applications

Abstract Miniature pumping system is widely used in mechanical and bio-medical fields, and in this regard, extensive researches are being conducted in related applications. This paper reports a novel piezoelectric-driven miniature pump that can achieve high flow rate through a combination of piezoelectric-actuator and pumping chamber with internal rib structures. The major features of the proposed miniature pump are self-priming and high flow rate at low frequency range. Flow rates at different frequencies were measured under different piezoelectric-actuator thicknesses and fluid viscosities. In addition, the correlation between the actuator displacement and the pumping efficiency at different frequencies was investigated and discussed. High flow rates of up to 196 ml/min and 141 ml/min were achieved for water and blood mimicking fluid, respectively. It was achieved by using a piezoelectric actuator with a 0.2 mm thick piezoelectric layer and a 0.25 mm thick brass plate, and a pumping chamber with 0.05 mm embedded flow-guiding rib structures for pumping efficiency improvement.

[1]  Bo-Ren Chen,et al.  Development of an OAPCP-micropump liquid cooling system in a laptop , 2009 .

[2]  Farid Amirouche,et al.  Low-cost high performance disposable micropump for fluidic delivery applications , 2011 .

[3]  Satoshi Konishi,et al.  Fabrication and drive test of pneumatic PDMS micro pump , 2007 .

[4]  G. Stemme,et al.  A valveless diffuser/nozzle-based fluid pump , 1993 .

[5]  Bo-Ren Hou,et al.  The improved performance of one-side actuating diaphragm micropump for a liquid cooling system , 2008 .

[6]  Bumkyoo Choi,et al.  A study on the development of a continuous peristaltic micropump using magnetic fluids , 2006 .

[7]  Grant P. Steven,et al.  A Review on the Modelling of Piezoelectric Sensors and Actuators Incorporated in Intelligent Structures , 1998 .

[8]  Christopher J. Morris,et al.  Optimization of a circular piezoelectric bimorph for a micropump driver , 2000 .

[9]  Shaochen Chen,et al.  Analytical analysis of a circular PZT actuator for valveless micropumps , 2003 .

[10]  Nam-Trung Nguyen,et al.  A fully polymeric micropump with piezoelectric actuator , 2004 .

[11]  Nam-Trung Nguyen,et al.  Integrated flow sensor for in situ measurement and control of acoustic streaming in flexural plate wave micropumps , 2000 .

[12]  Jan Gimsa,et al.  ac-Field-induced fluid pumping in microsystems with asymmetric temperature gradients. , 2009, Physical review. E, Statistical, nonlinear, and soft matter physics.

[13]  J. Raimond,et al.  Generation of Einstein-Podolsky-Rosen Pairs of Atoms , 1997 .

[14]  A. Pisano,et al.  Modeling and optimal design of piezoelectric cantilever microactuators , 1997 .

[15]  Mir Majid Teymoori,et al.  Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications , 2005 .

[16]  Bakhtier Farouk,et al.  Dynamic Analysis of Bulk Acoustic Wave Piezoelectric Micropumps: Effects of Inlet-Outlet Port Angles and Overall Pump Size , 2013 .

[17]  Henrik Bruus,et al.  Acoustofluidics 1: Governing equations in microfluidics. , 2011, Lab on a chip.

[18]  Li Wang,et al.  Characteristics and fabrication of NiTi/Si diaphragm micropump , 2001 .

[19]  Hwan-Sik Yoon,et al.  Piezoceramic actuated aperture antennae , 1998 .

[20]  S. J. Kim,et al.  Optimal design of piezoactuators for active noise and vibration control , 1991 .

[21]  Nam-Trung Nguyen,et al.  A polymeric piezoelectric micropump based on lamination technology , 2004 .

[22]  Yean-Der Kuan,et al.  Design and fabrication of a magnetic fluid micropump for applications in direct methanol fuel cells , 2011 .

[23]  Yi Luo,et al.  Vibration performances of polymeric micropump actuated by PbZrTiO 3 bimorph , 2013 .