Fabrication of chirped gratings on GaAs optical waveguides

Abstract After a brief review of the applications and fabrication techniques of gratings in integrated and guided wave optics, a new method of fabricating chirped gratings is presented. The method is based on the interference of two spherical laser beams after spatial filtering by pinholes. The experimental conditions required for fabricating antisymmetric linearly chirped gratings, symmetric quadratically chirped gratings and uniform gratings are presented by way of example. By this method chirped gratings with small variations in the period can be fabricated on GaAs thin film optical waveguides. Profiles and patterns of chemically etched corrugations are quite uniform, mainly because of the direct interference of beams immediately after spatial filtering.

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