Finite element simulation for a micro-machined cantilever optical switch

In this paper, the principle of a cantilever-beam micro-mechanical switch with SiO2 optical waveguide on silicon is described, and the solid model of the switch is established and finite element method (FEM) is used in studying its dynamic characteristics. Under different parameters, the modal characteristics are simulated and analyzed. The influence of the switch structural dimension on the resonant frequency and dynamic characteristics of the switch are investigated, and the harmonic response of the micro-mechanical optical switch is achieved. The results of analysis offers reliable basis for the structure design of the micro-machined cantilever optical switch.