论文信息 - Impact of UV Nanosecond Laser Annealing on Composition and Strain of Undoped Si0.8Ge0.2 Epitaxial Layers - 字舞流文

Impact of UV Nanosecond Laser Annealing on Composition and Strain of Undoped Si0.8Ge0.2 Epitaxial Layers

J. Hartmann | S. Kerdilès | V. Delaye | A. Papon | P. Acosta-Alba | A. Grenier | P. Gergaud | T. T. Nguyen | N. Bernier | J. Aubin | F. Cristiano | L. Dagault | J. Barnes | P. Gergaud | A. M. Papon | V. Delaye