Thermal Durability of Diamond Like Carbon Films Containing Tungsten Fabricated by Focused-Ion-Beam Chemical Vapor Deposition

Diamond like carbon film containing tungsten (W-DLC) was fabricated by focused-ion-beam chemical-vapor deposition (FIB-CVD), and its thermal durability was investigated using near the carbon K-edge X-ray absorption fine structure (C-K NEXAFS) spectroscopy and a combination of Rutherford backscattering and elastic recoil detection analysis, in comparison with those of commercial DLC and W-DLC films. The concentration of W in the films did not decrease when the annealing temperature was increased, while the concentration of H did. The sp2/(sp2+sp3) ratio of carbon atoms in the films increased with annealing temperature. The W-DLC film fabricated by FIB-CVD unchanged after annealing for 32 h at 873 K in vacuum. Its thermal durability was comparable to that of commercially available films.

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