Analysis Method of the Dynamic Force and Torque Distribution in the Magnet Array of a Commutated Magnetically Levitated Planar Actuator
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Elena A. Lomonova | J. C. Compter | J. W. Jansen | J. M. M. Rovers | J. Jansen | J. Rovers | E. Lomonova | J. Compter
[1] Sang-Ho Lee,et al. Positioning performance and straightness error compensation of the magnetic levitation stage supported by the linear magnetic bearing , 2003, IEEE Trans. Ind. Electron..
[2] Kazuaki Suzuki,et al. Microlithography : Science and Technology, Second Edition , 2007 .
[3] E.A. Lomonova,et al. Calculation of the Static Forces Among the Permanent Magnets in a Halbach Array , 2009, IEEE Transactions on Magnetics.
[4] J. de Boeij,et al. Contactless Planar Actuator With Manipulator: A Motion System Without Cables and Physical Contact Between the Mover and the Fixed World , 2009, IEEE Transactions on Industry Applications.
[5] Gijs J M Krijnen,et al. Design and Fabrication of a Planar Three-DOFs MEMS-Based Manipulator , 2010, Journal of Microelectromechanical Systems.
[6] Y. Ueda,et al. A Planar Actuator with a Small Mover Traveling Over Large Yaw and Translational Displacements , 2008, IEEE Transactions on Magnetics.
[7] Jin Ming Yang,et al. High-precision position control of a novel planar switched reluctance motor , 2005, IEEE Transactions on Industrial Electronics.
[8] 刑部 祐一,et al. Alignment apparatus and projection exposure apparatus using the same , 1997 .
[9] Mei-Yung Chen,et al. A New Design of a Submicropositioner Utilizing Electromagnetic Actuators and Flexure Mechanism , 2010, IEEE Transactions on Industrial Electronics.
[10] M.A. da Silveira,et al. An analytical method to predict the static performance of a planar actuator , 2003, Digest of INTERMAG 2003. International Magnetics Conference (Cat. No.03CH37401).
[11] J. Ish-Shalom,et al. A finite element model for real-time compensation of the thermal deformation of the platen of a planar step motor , 1994, Proceedings of the 1994 IEEE International Conference on Robotics and Automation.
[12] Aly Ferreira Flores Filho,et al. Analysis of an induction planar actuator , 2010 .
[13] J. Jansen,et al. Modeling of Magnetically Levitated Planar Actuators With Moving Magnets , 2007, IEEE Transactions on Magnetics.
[14] G. Akoun,et al. 3D analytical calculation of the forces exerted between two cuboidal magnets , 1984 .
[15] E.A. Lomonova,et al. Analytic expressions for the Lorentz force and torque on a line current with arbitrary orientation due to a cuboidal permanent magnet , 2010, Digests of the 2010 14th Biennial IEEE Conference on Electromagnetic Field Computation.
[16] Masayoshi Esashi,et al. A piezodriven XY-microstage for multiprobe nanorecording , 2003 .
[17] A. Tounzi,et al. Reduction of force ripples in PM planar actuator , 2010, The XIX International Conference on Electrical Machines - ICEM 2010.
[18] Li Pheng Khoo,et al. Investigation of thermal effect in permanent magnet linear motor stage , 2010, 2010 11th International Conference on Control Automation Robotics & Vision.
[19] David L. Trumper,et al. High-precision magnetic levitation stage for photolithography , 1998 .
[20] Elena A. Lomonova,et al. Commutation of a Magnetically Levitated Planar Actuator with Moving-Magnets , 2008 .
[21] J W Jansen,et al. Analytical Calculation of the Force Between a Rectangular Coil and a Cuboidal Permanent Magnet , 2010, IEEE Transactions on Magnetics.
[22] Elena A. Lomonova,et al. Model based commutation containing edge coils for a moving magnet planar actuator , 2009 .
[23] A.J.A. Vandenput,et al. Ironless magnetically levitated planar actuator , 2008 .