미세사면체 금형 패턴가공을 위한 초정밀 세이핑 시스템 제작

Recently, Ultraprecision machining of components and dies, such as Fresnel mirrors, diffraction lenses, and die for super high-intensity reflective sheet, has become one of the major targets in the field of micromanufacturing for the information and communication industries. In this paper, an ultraprecision shaping system was manufactured to machine these types of micro patterns. Micro V-grooves and tetrahedron pattern arrays were machined on a super high-intensity reflective sheet to evaluate theperformance of the shaping system. The results demonstrated that the positioning accuracy of the shaping system had a 10-㎚ resolution along the y- and z-axes, and that the straightness of the x-axis was within 100 ㎚. Micro V-grooves were machined for 100-㎚ cut depths, producing good quality micro tetrahedron patterns.