Fabrication of SiC microelectromechanical systems using one-step dry etching
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Liudi Jiang | Rebecca Cheung | Mehran Mehregany | Alun Harris | Jim Burdess | Musaab Hassan | Christian A. Zorman | M. Mehregany | C. Zorman | R. Cheung | J. Burdess | Liudi Jiang | A. Harris | Musaab Hassan
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