A MEMS tunable metamaterial filter

This paper presents a terahertz tunable metamaterial filter using microelectromechanical systems (MEMS) structures. The metamaterial unit cells are tuned by micromachined comb-drive. The metamaterial slab works as a notch filter of THz region, which can lower the transmission of interest frequency down to −70 dB. In the experiment, it measures the tuning range of filter frequency from 3.32 to 3.80 THz. The tunable metamaterial filter has better tunability compared with traditional active metamaterial because the optical property of metamaterial is more sensitive to the change of the unit cell structure.

[1]  Xuming Zhang,et al.  Modeling of the optical torsion micromirror , 1999, International Symposium on Photonics and Applications.

[2]  X.M. Zhang,et al.  Continuous wavelength tuning in micromachined Littrow external-cavity lasers , 2005, IEEE Journal of Quantum Electronics.

[3]  Tatsuo Itoh,et al.  Electromagnetic metamaterials : transmission line theory and microwave applications : the engineering approach , 2005 .

[4]  Ai Qun Liu,et al.  A study of dynamic characteristics and simulation of MEMS torsional micromirrors , 2005 .

[5]  Willie J Padilla,et al.  Active terahertz metamaterial devices , 2006, Nature.

[6]  X.M. Zhang,et al.  A Real Pivot Structure for MEMS Tunable Lasers , 2007, Journal of Microelectromechanical Systems.

[7]  Andrea Alù,et al.  Dielectric sensing in ε-near-zero narrow waveguide channels , 2008 .

[8]  Martin Koch,et al.  Thin-film sensing with planar asymmetric metamaterial resonators , 2008 .

[9]  H. Cai,et al.  A miniature tunable coupled-cavity laser constructed by micromachining technology , 2008 .

[10]  Y. Wang,et al.  Plasmon-induced transparency in metamaterials. , 2008, Physical review letters.

[11]  Ai Qun Liu,et al.  A micromachined optical double well for thermo-optic switching via resonant tunneling effect , 2008 .

[12]  Disorder-induced coherent scattering in slow-light photonic crystal waveguides , 2009 .

[13]  R. Averitt,et al.  Terahertz Metamaterials with Simultaneously Negative Electric and Magnetic Resonance Responses based on Bimaterial Pop Up Structures , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[14]  Kosmas L. Tsakmakidis,et al.  ‘Trapped rainbow’ storage of light in metamaterials , 2007, Nature.