Modelling of High-Voltage SOI-LDMOS Transistors including Self-Heating

This paper presents (i) the compact modelling and (ii) the parameter extraction strategy of a 12 V SOI-LDMOS transistor. The LDMOS transistor is characterized by a macro model consisting of the physics based Philips’ MOS Model 9 (MM9) for the channel and MOS Model 31 (MM31) for the drift region. Incorporation of the effect of self-heating during parameter extraction shows that the DC-characteristics can be described consistently and accurately over a wide range of biases, temperatures and device dimensions.