Research on multi-parameter transducer and Integrated Measurement System (IMS)

In this paper, a novel high-g monolithic three-dimensional accelerometer is demonstrated, which separate coupled accelerations mechanically through eight parallel beams. The integration of the accelerometer with pressure and tempreture sensor is also demonstrated. The detailed structure design, simulation, manufacture process, package as well as the final testing results are presented. The Integrated Measurement System (IMS) consists of the transducer and an ASIC (TH9801), which is developed for the special application such as weapon, aviation, spaceflight, missile, automotive testing etc.. Two typical applications of the system are demonstrated in the end.

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