Manufacturing of three-dimensional micro-parts by UV laser induced polymerization

This research deals with the development of a simple and practical method for manufacturing high-aspect-ratio (height/width) micro-parts and three-dimensional micro-parts. The desired product shape is obtained by writing along the contour of the product on the surface of a liquid photopolymer using a focused UV laser beam. The written pattern then becomes solid so as to produce a solidified polymer mold or structure. This paper examines the effect of physical parameters such as wavelength of laser beam, focal length of lens, absorption coefficient and writing speed on the shapes of the solidified polymer. The examination is done theoretically, and the optimum conditions to produce high-aspect-ratio micro-parts and three-dimensional micro-parts are also verified. Using these conditions, various microstructures are produced.

[1]  W. Menz,et al.  The LIGA technique-A novel concept for microstructures and the combination with Si-technologies by injection molding , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[2]  M. Mehregany,et al.  Integrated fabrication of polysilicon mechanisms , 1988 .

[3]  G. Rubloff Maskless selected area processing , 1989 .

[4]  Bumkyoo Choi,et al.  Deep X-ray and UV lithographies for micromechanics , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[5]  A. B. Frazier,et al.  High aspect ratio electroplated microstructures using a photosensitive polyimide process , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

[6]  T. Nakamoto,et al.  Consideration on the accuracy of fabricating microstructures using UV laser induced polymerization , 1994, 1994 5th International Symposium on Micro Machine and Human Science Proceedings.

[7]  Bumkyoo Choi,et al.  Fabrication and testing of the planar magnetic micromotor , 1991 .

[8]  Takeshi Nakamoto,et al.  The Accuracy of Micro-molds Produced by a UV Laser Induced Polymerization , 1994 .

[9]  Paul F. Jacobs,et al.  Rapid Prototyping & Manufacturing: Fundamentals of Stereolithography , 1992 .

[10]  H. Reichl,et al.  Fabrication of high depth-to-width aspect ratio microstructures , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

[11]  Toshimitsu Asakura,et al.  Laser-beam scanning system using an acoustic-optic deflector : its application to fundus imaging , 1990 .

[12]  T. Christenson,et al.  Metal micromechanisms via deep X-ray lithography, electroplating and assembly , 1992 .

[13]  W. Ehrfeld,et al.  Application of the LIGA technique for the development of microactuators based on electromagnetic principles , 1992 .

[14]  U. Wallrabe,et al.  Microactuators fabricated by the LIGA process , 1992 .

[15]  The effect of physical parameters on the fabrication of microstructures by photo polymerization , 1994 .

[16]  Yu-Chong Tai,et al.  Integrated movable micromechanical structures for sensors and actuators , 1988 .