Reliability in MEMS: design of gold devices for mechanical fatigue tests

Design and modelling of MEMS test structures for the analysis of fatigue damage occurring in oscillating microstructures is presented. Finite Element models are realized to design specimen shapes and electro-mechanical actuation parameters. Two different structural geometries are defined to obtain both traction and shear tensile specimen actuations through the actuation of out-of-plane movable plates.

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