Integrated High-speed, High-responsivity Photodiodes in CMOS and BiCMOS Technology

A new double photodiode requiring no' process modifications in CMOS and BiC­ MOS technologies is shown to achieve a bandwidth in excess of 360 MHz and data rates exceeding 622 Mb/s. Furthermore, an innovative PIN photodiode requiring only one additional mask for the integration in a CMOS process is shown to be capable of handling a data rate of 1.1 Gb/s.