论文信息 - Tools for non-invasive optical characterization of CMOS circuits

Tools for non-invasive optical characterization of CMOS circuits

An optical non-invasive inspection technique is presented. This tool is able to probe the electrical waveforms propagating through ULSI circuits, by means of hot-carrier luminescence. From the experimental results and the luminescence characterization, we propose a SPICE model able to foresee MOSFET emission and bulk current during circuit simulation.

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