Eigenvalue Solution of Thermoelastic Damping in Beam Resonators Using a Finite Element Analysis

A finite element formulation is developed for solving the problem related to thermoelastic damping in beam resonator systems. The perturbation analysis on the governing equations of heat conduction, thermoleasticity, and dynamic motion leads to a linear eigenvalue equation for the exponential growth rate of temperature, displacement, and velocity. The numerical solutions for a simply supported beam have been obtained and shown in agreement with the analytical solutions found in the literature. Parametric studies on a variety of geometrical and material properties demonstrate their effects on the frequency and the quality factor of resonance. The finite element formulation presented in this work has advantages over the existing analytical approaches in that the method can be easily extended to general geometries without extensive computations associated with the numerical iterations and the analytical expressions of the solution under various boundary conditions. DOI: 10.1115/1.2748472

[1]  Stewart McWilliam,et al.  Thermoelastic damping of the in-plane vibration of thin silicon rings , 2006 .

[2]  Ali H. Nayfeh,et al.  Modeling and simulations of thermoelastic damping in microplates , 2004 .

[3]  F. Ayazi,et al.  Thermoelastic damping in trench-refilled polysilicon resonators , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[4]  J. Borenstein,et al.  Experimental study of thermoelastic damping in MEMS gyros , 2003 .

[5]  M. Roukes,et al.  Thermoelastic damping in micro- and nanomechanical systems , 1999, cond-mat/9909271.

[7]  D. Fang,et al.  Thermoelastic damping in micro-beam resonators , 2006 .

[8]  Yun-Bo Yi,et al.  Eigenvalue solution of thermoelastic instability problems using Fourier reduction , 2000, Proceedings of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences.

[9]  T. Roszhart The effect of thermoelastic internal friction on the Q of micromachined silicon resonators , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[10]  C. Zener INTERNAL FRICTION IN SOLIDS. I. THEORY OF INTERNAL FRICTION IN REEDS , 1937 .

[11]  Daniel J. Segalman,et al.  Calculation of damping matrices for linearly viscoelastic structures , 1987 .

[12]  L. Sekaric,et al.  Temperature-dependent internal friction in silicon nanoelectromechanical systems , 2000 .

[13]  L. Peterson,et al.  Predictive Elastothermodynamic Damping in Finite Element Models Using a Perturbation Formulation , 2005 .