Modeling and experiment of a planar 3-DOF parallel micromanipulator

In this paper, a planar 3-DOF XYγ parallel micromanipulator with monolithic structure is presented. The micromanipulator is driven by three piezoelectric (PZT) actuators. To achieve highly accurate control, a new approach investigating the relationship among input-force, payload, stiffness, and displacement (IPSD model) of the XYγ micromanipulator is proposed in analytical style, and the analytical expression of the relationship between driving voltages of PZT actuators and outputs of end-effector is deduced based on the IPSD model. Finally, in order to verify the IPSD model, the simulations by finite element method and experiment are performed. The micromanipulator can be used to do microtasks that need the manipulator perform only planar motion, such as microoperation and microassembly, and the proposed IPSD model is useful for both digital control and design of the XYγ micromanipulator.

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