Tactle array sensor with inclined chromium/silicon piezoresistive cantilevers embedded in elastomer

Tactile array sensor of the micro-cantilevers embedded in the elastomer has been fabricated to detect normal and 2-axes shear stresses. It is demonstrated that tactile array sensor with 3 × 3 detective elements can be fabricated with excellent yield. The sensor element is sensitive to both normal and shear stresses applied on entire sensor surface. Moreover, it has good directional characteristics so that it is shown that magnitude and direction of shear stress can be obtained by difference of output voltages of adjacent sensor cantilevers. The sensor output has good reproducibility for multiple measurement. The output from sensor element drastically changes with shifting applying position of force. It is considered that we can obtain pressed position from distribution of output from sensor element array.