Semiconductor manufacturing system verifying parameters in realtime and manufacturing method thereof

PURPOSE: A semiconductor manufacturing system for inspecting a parameter in real-time is provided to reduce a defect ratio of a product and to improve productivity of a manufacturing process, by making a process manager monitor an event in real-time to take necessary actions. CONSTITUTION: A process for manufacturing a semiconductor is performed in at least one manufacturing apparatus. An equipment computer(EC)(130) is connected to the manufacturing apparatuses. A control program for controlling the manufacturing apparatus is written and performed in the EC. A control program for controlling the operation of the EC is written and performed in a manufacturing execution system(MES)(110) connected to all of the EC's. A predetermined scope of specifications regarding parameters used in the control process is stored in a specification database connected to the control program of the MES. A storing device(120) includes the manufacturing apparatus, the EC, the MES and the specification database. If an event wherein a resultant value of the manufacturing process falls outside the scope of the specification happens, an information module receives the event and makes a manager monitor the event in real-time, and a write module stores the event in the storing device. An inspection unit(160) is composed of the information module and the write module.