Modeling and simulation of magnetically confined low-pressure plasmas in two dimensions

A hybrid electron fluid-particle ion model of a cylindrical axisymmetric discharge with conducting walls and a uniform axial magnetic field has been developed. The chamber is 30 cm in length and 15 cm in diameter. Power is deposited into electrons with a uniform axial profile and two model radial profiles: uniform power per electron (flat), and power per electron varying as the square of a J/sub 0/ Bessel function (peaked). The major results of the study are that it is possible to treat two-dimensional systems with very small Debye-length-to-system-chamber-length scale ratios, and that the radial power deposition profile appears to have a marked effect on the nature of the plasma profiles, including the ion flux profiles. >

[1]  J. H. Whealton.  Ion extraction and optics arithmetic , 1981 .

[2]  D. Rapp,et al.  Total Cross Sections for Ionization and Attachment in Gases by Electron Impact. I. Positive Ionization , 1965 .

[3]  Y. H. Lee,et al.  Plasma characterization of an electron cyclotron resonance–radio‐frequency hybrid plasma reactor , 1989 .

[4]  A. Simon.  Ambipolar Diffusion in a Magnetic Field , 1955 .

[5]  R. Boswell,et al.  Numerical modeling of low-pressure RF plasmas , 1990 .

[6]  Evangelos Gogolides,et al.  Comparison of experimental measurements and model predictions for radio‐frequency Ar and SF6 discharges , 1989 .

[7]  E. A. Hartog,et al.  Laser‐induced fluorescence measurements of transverse ion temperature in an electron cyclotron resonance plasma , 1990 .

[8]  O. A. Popov,et al.  Electron cyclotron resonance plasma stream source for plasma enhanced chemical vapor deposition , 1989 .

[9]  R. Gottscho,et al.  Spatially resolved ion velocity distributions in a diverging field electron cyclotron resonance plasma reactor , 1990 .

[10]  M. Surendra,et al.  Particle simulations of radio-frequency glow discharges , 1991 .

[11]  Sommerer,et al.  Electron heating mechanisms in helium rf glow discharges: A self-consistent kinetic calculation. , 1989, Physical review letters.

[12]  I. J. Morey,et al.  Self‐consistent simulation of a parallel‐plate rf discharge , 1988 .

[13]  G. Kino,et al.  Two‐Dimensional Low‐Pressure Discharge Theory , 1966 .

[14]  Karl-Birger Persson.  Inertia-Controlled Ambipolar Diffusion , 1962 .

[15]  Morito Matsuoka,et al.  Magnetic field gradient effects on ion energy for electron cyclotron resonance microwave plasma stream , 1988 .

[16]  W. M. Holber,et al.  Ion energetics in electron cyclotron resonance discharges , 1990 .

[17]  David B. Graves,et al.  Electron heating in low‐pressure rf glow discharges , 1990 .

[18]  C. Pomot,et al.  Microwave multipolar plasma for etching and deposition , 1989 .

[19]  S. Self.  Steady‐State Theory of a Low‐Pressure Discharge Column in an Axial Magnetic Field , 1967 .

[20]  Irene A. Stegun,et al.  Handbook of Mathematical Functions. , 1966 .

[21]  O. A. Popov,et al.  Characteristics of electron cyclotron resonance plasma sources , 1989 .

[22]  W. H. Cramer.  Elastic and Inelastic Scattering of Low‐Velocity Ions: Ne+ in A, A+ in Ne, and A+ in A , 1959 .

[23]  D. Ilić.  Theory of a steady-state nonisothermal positive column in a magnetic field , 1973 .

[24]  J. Forster,et al.  Plasma characterization for a divergent field electron cyclotron resonance source , 1989 .

[25]  Masatoshi Oda,et al.  Reactive ion stream etching utilizing electron cyclotron resonance plasma , 1986 .

[26]  J. Boeuf,et al.  Numerical model of rf glow discharges. , 1987, Physical review. A, General physics.

[27]  J. Asmussen.  Electron cyclotron resonance microwave discharges for etching and thin‐film deposition , 1989 .

[28]  J. C. Whitson,et al.  Optics of ion beams of arbitrary perveance extracted from a plasma , 1978 .

[29]  Charles K. Birdsall,et al.  Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC , 1991 .

[30]  F. J. Heer,et al.  Total cross sections for electron scattering by Ne, Ar, Kr and Xe , 1979 .

[31]  K. Jensen,et al.  A Continuum Model of DC and RF Discharges , 1986, IEEE Transactions on Plasma Science.

[32]  Lewi Tonks,et al.  A General Theory of the Plasma of an Arc , 1929 .

[33]  S. A. Self,et al.  Static Theory of a Discharge Column at Intermediate Pressures , 1966 .