First demonstration of gate voltage-less chemical vapour deposition graphene for non-vacuum thermoelectric study

Graphene has been well studied to be an excellent thermoelectric (TE) material of choice for thermal detection. It is widely considered a key enabler for next-in-class infrared (IR) detectors given its superb carrier mobility, sensitivities and broadband absorption in far-IR range surpassing that of current thermopiles. Normally, TE studies are conducted using graphene exfoliated from graphite crystal. It is then transferred onto Si/SiO2 substrate and fabricated into Hall bar configuration with microheater at one end. A gate voltage (Vg) is passed through the substrate and the response is examined in vacuum condition. By tuning the Vg, one can possibly obtain different thermoelectric power (TEP) values. The challenge is to maintain optimum Vg for the TE device to function which requires higher power consumption. This translate to the need for additional power supply. In this report, we proposed CVDG as TE material. Typically, CVDG are synthesized on Cu film and eventually transferred onto Si/SiO2 substrate. The benefit of CVDG is that it is large area, relatively inexpensive and does not require a Vg with associated circuitry. For the first time, CVDG system was extended to nonvacuum condition to simulate open detector system where detector is exposed to sensing environment. Average TEP was measured to be 168μV/K at 298K. Moreover, CVDG is tested to be stable in air over several months with little or no decrease in performance. A comprehensive characterization between exfoliated and CVDG will be presented. In addition, measurement results for vacuum and non-vacuum detector mode will be compared as well.

[1]  Andre K. Geim,et al.  The rise of graphene. , 2007, Nature materials.

[2]  Tie Li,et al.  Robust Array-Composite Micromachined Thermopile IR Detector by CMOS Technology , 2011, IEEE Electron Device Letters.

[3]  Kenji Watanabe,et al.  High thermoelectricpower factor in graphene/hBN devices , 2016, Proceedings of the National Academy of Sciences.

[4]  R. Ruoff,et al.  Thermal transport in suspended and supported monolayer graphene grown by chemical vapor deposition. , 2010, Nano letters.

[5]  S. Xiao,et al.  Intrinsic and extrinsic performance limits of graphene devices on SiO2. , 2007, Nature nanotechnology.

[6]  R. Nair,et al.  Thermal conductivity of graphene in corbino membrane geometry. , 2010, ACS nano.

[7]  M. Gaitan,et al.  Wire-bonding process monitoring using thermopile temperature sensor , 2005, IEEE Transactions on Advanced Packaging.

[8]  SUPARNA DUTTASINHA,et al.  Graphene: Status and Prospects , 2009, Science.

[9]  K. Müllen,et al.  Exfoliation of graphite into graphene in aqueous solutions of inorganic salts. , 2014, Journal of the American Chemical Society.

[10]  Andre K. Geim,et al.  Electric Field Effect in Atomically Thin Carbon Films , 2004, Science.

[11]  Dong-Keun Ki,et al.  Thermoelectric transport of massive Dirac fermions in bilayer graphene , 2010, 1005.4739.

[12]  S. Louie,et al.  High thermoelectric power factor in two-dimensional crystals of Mo S 2 , 2017 .

[13]  Moon-Ho Jo,et al.  Thermoelectric materials by using two-dimensional materials with negative correlation between electrical and thermal conductivity , 2016, Nature Communications.

[14]  M. Pumera,et al.  Nitrogen-doped graphene: effect of graphite oxide precursors and nitrogen content on the electrochemical sensing properties. , 2017, Physical chemistry chemical physics : PCCP.

[15]  Li Shi,et al.  Two-Dimensional Phonon Transport in Supported Graphene , 2010, Science.

[16]  Sang Wook Lee,et al.  Thermal conductivity of suspended pristine graphene measured by Raman spectroscopy , 2011, 1103.3337.

[17]  Darshana Wickramaratne,et al.  Electronic and thermoelectric properties of few-layer transition metal dichalcogenides. , 2014, The Journal of chemical physics.

[18]  Sushil Auluck,et al.  Thermoelectric properties of a single graphene sheet and its derivatives , 2014 .

[19]  C. Oshima,et al.  REVIEW ARTICLE: Ultra-thin epitaxial films of graphite and hexagonal boron nitride on solid surfaces , 1997 .

[20]  A. Geim,et al.  Two-dimensional gas of massless Dirac fermions in graphene , 2005, Nature.

[21]  Yuelin Wang,et al.  Uncooled Thermoelectric Infrared Sensor With Advanced Micromachining , 2012, IEEE Sensors Journal.

[22]  Pasqualina M. Sarro,et al.  Silicon accelerometer based on thermopiles , 1995 .

[23]  Y. Qian,et al.  One-pot hydrothermal synthesis of Nitrogen-doped graphene as high-performance anode materials for lithium ion batteries , 2016, Scientific Reports.

[24]  J. Coleman,et al.  High-yield production of graphene by liquid-phase exfoliation of graphite. , 2008, Nature nanotechnology.