论文信息 - An experimental verification of the compensation of length change of line scales caused by ambient air pressure

An experimental verification of the compensation of length change of line scales caused by ambient air pressure

Line scales are used as a working standard of length for the calibration of optical measuring instruments such as profile projectors, measuring microscopes and video measuring systems. The authors have developed a one-dimensional calibration system for line scales to obtain a lower uncertainty of measurement. The scale calibration system, named Standard Scale Calibrator SSC-05, employs a vacuum interferometer system for length measurement, a 633 nm iodine-stabilized He?Ne laser to calibrate the oscillating frequency of the interferometer laser light source and an Abbe's error compensation structure. To reduce the uncertainty of measurement, the uncertainty factors of the line scale and ambient conditions should not be neglected. Using the length calibration system, the expansion and contraction of a line scale due to changes in ambient air pressure were observed and the measured scale length was corrected into the length under standard atmospheric pressure, 1013.25 hPa. Utilizing a natural rapid change in the air pressure caused by a tropical storm (typhoon), we carried out an experiment on the length measurement of a 1000 mm long line scale made of glass ceramic with a low coefficient of thermal expansion. Using a compensation formula for the length change caused by changes in ambient air pressure, the length change of the 1000 mm long line scale was compensated with a standard deviation of less than 1 nm.

Akira Takahashi | Nobuharu Miwa

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