Institute of Physics Publishing Journal of Micromechanics and Microengineering Nano-ridge Fabrication by Local Oxidation of Silicon Edges with Silicon Nitride as a Mask
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Henri V. Jansen | Jeroen Haneveld | Erwin Berenschot | Pascale Maury | J. Haneveld | H. Jansen | E. Berenschot | P. Maury
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