论文信息 - Possibility of programming and optimal control of growth in the Czochralski technique

Possibility of programming and optimal control of growth in the Czochralski technique

Abstract From the analysis of nonstationary thermal processes the behaviour of crystallization rate and impurity distribution under a change of Czochralski system parameters is derived. It is shown that the crystal diameter stabilizion by pulling rate variations does not lead to stability of the crystallization rate. A new technique of optimal control and programming, which ensures the stability of the crystallization rate, is suggested.

H. G. Nalbandyan

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