论文信息 - Material and Electrical Characterization of Carbon-Doped Ta 2 O 5 Films for Embedded DRAM Applications - 字舞流文

Material and Electrical Characterization of Carbon-Doped Ta 2 O 5 Films for Embedded DRAM Applications

Jane P. Chang | R. Fleming | D. Lang | M. Steigerwald | R. V. Dover | R. Opila | K. Chu | Byeong-Ok Cho | C. Jones