Optimal design and fabrication of a piezoactuated flexure XYZ parallel micropositioning stage

This paper presents the design and fabrication process of a new piezoelectrically actuated flexure-based XYZ compliant parallel-kinematics micropositioning stage with totally decoupled properties. The proposed XYZ stage consists of three limbs which are assembled in an orthogonal manner, and it has both input and output decoupling properties. Analytical models for kinematics, statics, and dynamics of the XYZ stage are established, which are validated by finite element analysis performed with ANSYS. Based on the derived models, architectural parameters of the stage are optimized and a prototype is developed for experimental studies. The results not only verify the effectiveness of the conducted optimum design but also confirm the well-decoupled performance of the XYZ stage, which will be used to execute micro-/nanomanipulation tasks.

[1]  Larry L. Howell,et al.  An XYZ Micromanipulator with three translational degrees of freedom , 2006, Robotica.

[2]  Xianmin Zhang,et al.  Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage , 2008 .

[3]  Qingsong Xu,et al.  Error analysis and optimal design of a class of translational parallel kinematic machine using particle swarm optimization , 2009, Robotica.

[4]  Annika Raatz,et al.  Pseudoelastic flexure hinges in robots for microassembly , 2000, SPIE Optics East.

[5]  Shorya Awtar,et al.  Constraint-based design of parallel kinematic XY flexure mechanisms , 2007 .

[6]  Qingsong Xu,et al.  Design and Analysis of a Totally Decoupled Flexure-Based XY Parallel Micromanipulator , 2009, IEEE Transactions on Robotics.

[7]  Maurice Clerc,et al.  The particle swarm - explosion, stability, and convergence in a multidimensional complex space , 2002, IEEE Trans. Evol. Comput..

[8]  J. E. McInroy,et al.  Modeling and design of flexure jointed Stewart platforms for control purposes , 2002 .

[9]  Xin-Jun Liu,et al.  A three translational DoFs parallel cube-manipulator , 2003, Robotica.

[10]  Reymond Clavel,et al.  Study of the sources of inaccuracy of a 3 DOF flexure hinge-based parallel manipulator , 2004, IEEE International Conference on Robotics and Automation, 2004. Proceedings. ICRA '04. 2004.

[11]  I-Ming Chen,et al.  A Large-Displacement 3-DOF Flexure Parallel Mechanism with Decoupled Kinematics Structure , 2006, 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems.

[12]  Il Hong Suh,et al.  Design and experiment of a 3-DOF parallel micromechanism utilizing flexure hinges , 2002, IEEE Trans. Robotics Autom..

[13]  Yacine Amirat,et al.  Six degrees of freedom parallel robots with C5 links , 1992, Robotica.

[14]  Rong-Fong Fung,et al.  System identification of a dual-stage XY precision positioning table , 2009 .

[15]  Brian Birge,et al.  PSOt - a particle swarm optimization toolbox for use with Matlab , 2003, Proceedings of the 2003 IEEE Swarm Intelligence Symposium. SIS'03 (Cat. No.03EX706).

[16]  I-Ming Chen,et al.  Stiffness modeling of flexure parallel mechanism , 2005 .

[17]  Wen-Yuh Jywe,et al.  Precision tracking control of a piezoelectric-actuated system , 2007, 2007 Mediterranean Conference on Control & Automation.