New type of micropump using SMA thin film actuator

In this paper, a new prototype model of a micropump using a SMA thin film actuator as the servo actuator is proposed. This micropump consist of two one-way valves that make use of the same SMA thin film actuator. The overall size of this micropump prototype is 12mm in diameter and 20mm in length. The characteristics of the micropump were measured, experimental results indicating that the micropump provides satisfactory responses.