Imec silicon photonics platforms: performance overview and roadmap
暂无分享,去创建一个
P. Verheyen | D. Velenis | P. Absil | J. de Coster | J. Van Campenhout | P. De Heyn | G. Lepage | S. Balakrishnan | Y. Ban | Wei Guo | Pengfei Xu | S. Lardenois | G. Muliuk | D. Yudistira | D. Bode | N. Golshani | M. Berciano | A. Tsiara | M. Martire | Sofie Janssen | Minkyu Kim | R. Magdziak | Filippo Ferraro | Natarajan Rajasekaran | Hakim Kobbi | L. Shiramin | Chiara Marchese | Selva Rajmohan | Shankr Nadarajan | Neha Singh | Sumi Radhakrishnan | Ayze Karagoz | Abdul H. Shahar | M. Chakrabarti | Andy Miller | Kristof Croes
[1] P. Verheyen,et al. Wafer-Scale Hybrid Integration of InP DFB Lasers on Si Photonics by Flip-Chip Bonding With sub-300 nm Alignment Precision , 2023, IEEE Journal of Selected Topics in Quantum Electronics.
[2] R. Baets,et al. Micro-Transfer Printing for Heterogeneous Si Photonic Integrated Circuits , 2023, IEEE Journal of Selected Topics in Quantum Electronics.
[3] R. Nagarajan,et al. 2.5D Heterogeneous Integration for Silicon Photonics Engines in Optical Transceivers , 2023, IEEE Journal of Selected Topics in Quantum Electronics.
[4] C. Xiang,et al. Silicon nitride passive and active photonic integrated circuits: trends and prospects , 2022, Photonics Research.
[5] Duanni Huang,et al. Demonstration of a hybrid III-V/Si multi-wavelength DFB laser for high-bandwidth density I/O applications , 2022, Optical Fiber Communications Conference and Exhibition.
[6] E. Preisler,et al. Considerations for Silicon Photonics Process Technologies in a Commercial Foundry Environment , 2022, Optical Fiber Communications Conference and Exhibition.
[7] P. Verheyen,et al. Integrated optical transmitter with micro-transfer-printed widely tunable III-V-on-Si laser , 2022, 2022 Optical Fiber Communications Conference and Exhibition (OFC).
[8] P. Verheyen,et al. Low-loss, low-temperature PVD SiN waveguides , 2021, International Conference on Group IV Photonics.
[9] Tymon Barwicz,et al. Monolithically integrated silicon nitride platform , 2021, 2021 Optical Fiber Communications Conference and Exhibition (OFC).
[10] P. Soussan,et al. Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers , 2021, Conference on Lasers and Electro-Optics.
[11] S. Y. Siew,et al. Review of Silicon Photonics Technology and Platform Development , 2021, Journal of Lightwave Technology.
[12] Javier Ayala,et al. 45nm CMOS — Silicon Photonics Monolithic Technology (45CLO) for Next-Generation, Low Power and High Speed Optical Interconnects , 2020, 2020 Optical Fiber Communications Conference and Exhibition (OFC).
[13] A. Firrincieli,et al. Silicon nitride photonic platform for sensing applications , 2019, International Conference on Optical MEMS and Nanophotonics.
[14] A. Ray Chaudhuri,et al. A Versatile LPCVD Silicon Nitride Platform For Heterogenous Photonic Circuits: Ultra Tight Thickness Control And Low Propagation Loss , 2019, 2019 24th OptoElectronics and Communications Conference (OECC) and 2019 International Conference on Photonics in Switching and Computing (PSC).
[15] K. Croes,et al. Understanding EM-Degradation Mechanisms in Metal Heaters Used for Si Photonics Applications , 2019, 2019 IEEE International Reliability Physics Symposium (IRPS).
[16] P. Verheyen,et al. V-Groove Assisted Passive Assembly of Single-Mode Fibers to Ultra-Broadband Polarization-Insensitive Edge Couplers for Silicon Photonics , 2019, 45th European Conference on Optical Communication (ECOC 2019).
[17] K. Rebibis,et al. TSV-assisted Hybrid FinFET CMOS - Silicon Photonics Technology for High Density Optical I/O , 2019, European Conference on Optical Communication.
[18] S. Van Huylenbroeck,et al. High-Speed TSV Integration in an Active Silicon Photonics Interposer Platform , 2018, 2018 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S).
[19] J. De Coster,et al. Reliable 50Gb/s silicon photonics platform for next-generation data center optical interconnects , 2017, 2017 IEEE International Electron Devices Meeting (IEDM).
[20] K. Stechschulte,et al. Silicon-photonics-based optical transceivers for high-speed interconnect applications , 2016, SPIE OPTO.
[21] Alan Y. Liu,et al. Heterogeneous Silicon Photonic Integrated Circuits , 2016, Journal of Lightwave Technology.
[22] R. Baets,et al. Low-Loss Singlemode PECVD Silicon Nitride Photonic Wire Waveguides for 532–900 nm Wavelength Window Fabricated Within a CMOS Pilot Line , 2013, IEEE Photonics Journal.
[23] Y. Vlasov,et al. Cascaded Mach-Zehnder wavelength filters in silicon photonics for low loss and flat pass-band WDM (de-)multiplexing. , 2013, Optics express.
[24] Shankar Kumar Selvaraja,et al. Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors , 2012 .