论文信息 - A new type of dynamic infrared image modulator based on the MEMS technique

A new type of dynamic infrared image modulator based on the MEMS technique

In this paper, we have proposed a new type of DIRIM with suspended membrane resistor (SMR) structure, while mainly focusing on its implementation technology which includes selection of resistance material and fabrication technique of the membrane; design of Read-In-Integrated-Circuit; and implementation of silica-base MEMS process. Some performance parameters of the device are quoted to conclude the advantages of this new type of DIRIM and make an outlook on the key development in the future.

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