Novel applications of MOEMS display and imaging

Significant progresses have been made in MOEMS for display, imaging, telecommunication, and bioinstrumentation applications. This talk will first provide an overview of the recent advances in micromirror technologies. Then it will discuss three novel applications using MEMS micromirrors. First, a large port count wavelength-selective switch using a one-dimensional array of two-axis analog micromirrors will be described. Then the fabrication and packaging of two-axis micromirrors for in vivo endoscopic optical coherence tomography (OCT) imaging will be presented. Finally a new "optoelectronic tweezers" for manipulating microparticles and biological cells using direct images of MOEMS spatial light modulators will be described.

[1]  R.W. Tkach,et al.  On the expandability of free-space micromachined optical cross connects , 2000, Journal of Lightwave Technology.

[2]  C. R. Giles,et al.  1296-port MEMS transparent optical crossconnect with 2.07 petabit/s switch capacity , 2001, OFC 2001. Optical Fiber Communication Conference and Exhibit. Technical Digest Postconference Edition (IEEE Cat. 01CH37171).

[3]  Igal Brener,et al.  Electrostatic actuation of 3-D MEMS mirrors by sidewall electrodes , 2003, 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682).

[4]  Jui-che Tsai,et al.  1×N2 Wavelength-Selective Switches with High Fill-Factor Two-Axis Analog Micromirror Arrays , 2004 .

[5]  Lih Y. Lin,et al.  Opportunities and challenges for MEMS in lightwave communications , 2002 .

[6]  D.T. Neilson,et al.  Scalable micro mechanical optical crossconnects , 2000, LEOS 2000. 2000 IEEE Annual Meeting Conference Proceedings. 13th Annual Meeting. IEEE Lasers and Electro-Optics Society 2000 Annual Meeting (Cat. No.00CH37080).

[7]  R. Ryf,et al.  Micromechanical optical crossconnect with 4-F relay imaging optics , 2004, IEEE Photonics Technology Letters.

[8]  V. Aksyuk,et al.  Wavelength add-drop switching using tilting micromirrors , 1999 .

[9]  C. R. Giles,et al.  Wavelength-selective 1/spl times/4 switch for 128 WDM channels at 50 GHz spacing , 2002, Optical Fiber Communication Conference and Exhibit.

[10]  R. Frahm,et al.  238 x 238 micromechanical optical cross connect , 2003, IEEE Photonics Technology Letters.

[11]  Jui-che Tsai,et al.  Analog micromirror arrays with orthogonal scanning directions for wavelength-selective 1XN/sup 2/ switches , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[12]  Jui-che Tsai,et al.  Wavelength-selective 1xN/sup 2/ switches with two-dimensional input/output fiber arrays , 2003, Conference on Lasers and Electro-Optics, 2003. CLEO '03..

[13]  M.C. Wu,et al.  Monolithically cascaded micromirror pair driven by angular vertical combs for two-axis scanning , 2004, IEEE Journal of Selected Topics in Quantum Electronics.

[14]  R.T. Chen,et al.  A high-speed low-voltage stress-induced micromachined 2 x 2 optical switch , 1999, IEEE Photonics Technology Letters.

[15]  H. Fujita,et al.  Electrostatic micro torsion mirrors for an optical switch matrix , 1996 .

[16]  Larry J. Hornbeck,et al.  Deformable-Mirror Spatial Light Modulators , 1990, Optics & Photonics.

[17]  Hiroshi Toshiyoshi,et al.  Low voltage MEMS analog micromirror arrays with hidden vertical comb-drive actuators , 2002 .

[18]  C. King,et al.  Digital MEMS switch for planar photonic crossconnects , 2002, Optical Fiber Communication Conference and Exhibit.

[19]  Uzi Efron Spatial Light Modulators and Applications III , 1990 .

[20]  M.C. Wu,et al.  Dynamic DMD-driven optoelectronics tweezers for microscopic particle manipulation , 2004, Conference on Lasers and Electro-Optics, 2004. (CLEO)..

[21]  M.C. Wu,et al.  Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors , 2004, IEEE Journal of Selected Topics in Quantum Electronics.

[22]  Dooyoung Hah A High Fill-Factor, Large Scan-Angle, Two-Axis Analog Micromirror Array Driven by Leverage Mechanism , 2004 .

[23]  Giovanni De Gasperis,et al.  Trapping of micrometre and sub-micrometre particles by high-frequency electric fields and hydrodynamic forces , 1996 .

[24]  C. R. Giles,et al.  Beam-steering micromirrors for large optical cross-connects , 2003 .

[25]  M.C. Wu,et al.  Open-loop operation of MEMS WDM routers with analog micromirror array , 2002, IEEE/LEOS International Conference on Optical MEMs.

[26]  Hiroshi Toshiyoshi,et al.  A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators for WDM routers , 2002, Optical Fiber Communication Conference and Exhibit.

[27]  S Yazdanfar,et al.  Electrostatic micromachine scanning mirror for optical coherence tomography. , 2003, Optics letters.

[28]  Pei-Yu Chiou,et al.  DYNAMIC ARRAY MANIPULATION OF MICROSCOPIC PARTICLES VIA OPTOELECTRONIC TWEEZERS , 2004 .

[29]  Jui-Che Tsai,et al.  High fill-factor two-axis analog micromirror array for 1×N 2 wavelength-selective switches , 2004 .

[30]  R. W. Tkach,et al.  Free-space micromachined optical switches for optical networking , 1999 .

[31]  L. L. Buhl,et al.  Wavelength-selective 1x4 switch for 128 WDMchannels at 50 GHz spacing , 2002 .

[32]  Ming C. Wu,et al.  A 2D Scanner by Surface and Bulk Micromachined Angular Vertical Comb Actuators , 2003 .

[33]  R.W. Tkach,et al.  Angular-precision enhancement in free-space micromachined optical switches , 1999, IEEE Photonics Technology Letters.

[34]  Pei-Yu Chiou,et al.  A novel optoelectronic tweezer using light induced dielectrophoresis , 2003, 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682).

[35]  G. Fedder,et al.  Endoscopic optical coherence tomography based on a microelectromechanical mirror. , 2001, Optics letters.

[36]  H. Miyajima,et al.  A miniature confocal optical microscope with MEMS gimbal scanner , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[37]  Xiaoyu Mi,et al.  A multi-step DRIE process for a 128 /spl times/ 128 micromirror array , 2003, 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682).

[38]  Renshi Sawada,et al.  Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring , 2003, 2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682).

[39]  Hyung Choi,et al.  An optical switch with newly designed electrostatic actuators for optical cross connects , 2002, IEEE/LEOS International Conference on Optical MEMs.

[40]  S. Chu,et al.  Observation of a single-beam gradient force optical trap for dielectric particles. , 1986, Optics letters.

[41]  R.R.A. Syms Scaling laws for MEMS mirror-rotation optical cross connect switches , 2002 .

[42]  M.C. Wu,et al.  High fill-factor two-axis analog micromirror array for 1/spl times/N/sup 2/ wavelength-selective switches , 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

[43]  J. E. Bower,et al.  Monolithic fringe-field-activated crystalline silicon tilting-mirror devices , 2003 .

[44]  G S Kino,et al.  Micromachined scanning confocal optical microscope. , 1996, Optics letters.

[45]  Herbert Shea,et al.  Drift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000/spl times/1000-port optical crossconnect , 2003, OFC 2003 Optical Fiber Communications Conference, 2003..

[46]  D. Grier A revolution in optical manipulation , 2003, Nature.

[47]  Gregory A. Kirkos,et al.  A high fill factor linear mirror array for a wavelength selective switch , 2004 .

[48]  C. R. Giles,et al.  Fully provisioned 112/spl times/112 micro-mechanical optical crossconnect with 35.8 Tb/s demonstrated capacity , 2000, Optical Fiber Communication Conference. Technical Digest Postconference Edition. Trends in Optics and Photonics Vol.37 (IEEE Cat. No. 00CH37079).

[49]  David J. Bishop,et al.  Lucent Microstar micromirror array technology for large optical crossconnects , 2000, SPIE MOEMS-MEMS.

[50]  M.C. Wu,et al.  Cell addressing and trapping using novel optoelectronic tweezers , 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

[51]  Lih Y. Lin,et al.  Free-space micromachined optical switches with submillisecond switching time for large-scale optical crossconnects , 1998, IEEE Photonics Technology Letters.

[52]  WEDNESDAY AFTERNOON Wm Optical Mems Components , 2004 .

[53]  M.C. Wu,et al.  Two-dimensional endoscopic MEMS scanner for high resolution optical coherence tomography , 2004, Conference on Lasers and Electro-Optics, 2004. (CLEO)..

[54]  H. Miyajima,et al.  A MEMS gimbal scanner for a miniature confocal microscope , 2002, IEEE/LEOS International Conference on Optical MEMs.

[55]  Hiroshi Toshiyoshi,et al.  Surface-micromachined confocal scanning optical microscope , 2000, CLEO 2000.

[56]  Electro-optics Conference on lasers and electro-optics (CLEO) , 2003 .

[57]  S. Ueda,et al.  A 2-axis comb-driven micromirror array for 3D MEMS switches , 2002, IEEE/LEOS International Conference on Optical MEMs.

[58]  D. Peale,et al.  Modular MEMS-based optical cross-connect with large port-count , 2003, IEEE Photonics Technology Letters.

[59]  J. Bowers,et al.  Three-dimensional MEMS photonic cross-connect switch design and performance , 2003 .

[60]  Robert L. Wood,et al.  MEMS 2-D Matrix Switch , 2002, OFC 2002.

[61]  F. Klemens,et al.  Monolithic MEMS optical switch with amplified out-of-plane angular motion , 2002, IEEE/LEOS International Conference on Optical MEMs.

[62]  N. Takeuchi,et al.  Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch , 2002, IEEE/LEOS International Conference on Optical MEMs.

[63]  J. Fujimoto,et al.  In vivo endoscopic optical biopsy with optical coherence tomography. , 1997, Science.

[64]  J. Sibille,et al.  The MWS 1X4: A High Performance Wavelength Switching Building Block , 2002, 2002 28TH European Conference on Optical Communication.