Development of a compensated capacitive pressure and temperature sensor using adhesive bonding and chemical-resistant coating for multiphase chemical reactors
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Mu Chiao | Chad P. J. Bennington | M. Chiao | C. Bennington | A. R. Mohammadi | Abdolreza R. Mohammadi | Tim C. M. Graham | T. Graham
[1] Wen H. Ko,et al. Solid-state capacitive pressure transducers , 1986 .
[2] Q. Wang,et al. Application of Au-Sn eutectic bonding in hermetic radio-frequency microelectromechanical system wafer level packaging , 2006 .
[3] K. Wise,et al. A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity , 1982, IEEE Transactions on Electron Devices.
[4] Mehran Mehregany,et al. SiC MEMS: Opportunities and challenges for applications in harsh environments , 1999 .
[5] K.D. Wise,et al. Scaling limits in batch-fabricated silicon pressure sensors , 1987, IEEE Transactions on Electron Devices.
[6] M. Mehregany,et al. Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications , 2006, IEEE Sensors Journal.
[7] James H. Smith,et al. Micromachined pressure sensors: review and recent developments , 1997 .
[8] T. Rogers,et al. Selection of glass, anodic bonding conditions and material compatibility for silicon-glass capacitive sensors , 1995 .
[9] Babak Ziaie,et al. Silicon wafer bonding through RF dielectric heating , 2003 .
[10] H. Nathanson,et al. A microminiature solid-state capacitive blood pressure transducer with improved sensitivity. , 1973, IEEE transactions on bio-medical engineering.
[11] H. Sandmaier,et al. A square-diaphragm piezoresistive pressure sensor with a rectangular central boss for low-pressure ranges , 1993 .
[12] Gary A. Smook,et al. Handbook for Pulp and Paper Technologists , 1982 .
[13] K. Najafi,et al. Vacuum packaging technology using localized aluminum/silicon-to-glass bonding , 2002, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).
[14] Khalil Najafi,et al. Secondary sensitivities and stability of ultrasensitive silicon pressure sensors , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.
[15] Steven C. Martin,et al. Adhesive bonding in microelectronics and photonics , 2002 .
[16] R. W. Bernstein,et al. Capacitive differential pressure sensor for harsh environments , 2000 .
[17] R. Boudreau. Foreword contributions from the 50th electronic components and technology conference , 2001 .
[18] C. Bennington,et al. Aspects of liquor flow in a model chip digester measured using electrical resistance tomography , 2007 .
[19] M. Fonseca,et al. Wireless micromachined ceramic pressure sensor for high-temperature applications , 2002 .
[20] R. Gutmann,et al. Adhesive wafer bonding , 2006 .
[21] W.H. Ko,et al. A high-sensitivity integrated-circuit capacitive pressure transducer , 1982, IEEE Transactions on Electron Devices.
[22] R. Howe,et al. Batch transfer of microstructures using flip-chip solder bonding , 1999 .
[23] Hsiharng Yang,et al. A low-temperature wafer bonding technique using patternable materials , 2002 .
[24] Phillip W. Barth,et al. Silicon fusion bonding for fabrication of sensors, actuators and microstructures , 1990 .
[25] Henrik Jakobsen,et al. Silicon-to-thin film anodic bonding , 1992 .
[26] P. Pons,et al. Capabilities and limits of silicon pressure sensors , 1989 .
[27] Chad P. J. Bennington,et al. FLOW OF LIQUOR THROUGH WOOD CHIPS IN A MODEL DIGESTER , 2006 .
[28] M. Vellekoop,et al. Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers , 2000 .
[29] T. Y. Bin,et al. CAPSS: A thin diaphragm capacitive pressure sensor simulator , 1987 .
[30] Zhan Zhao,et al. Adhesive bonding with SU-8 in a vacuum for capacitive pressure sensors , 2008 .
[31] J. Oberhammer,et al. Selective wafer-level adhesive bonding with benzocyclobutene for fabrication of cavities , 2003 .
[32] K. Wise,et al. SENSIM: A simulation program for solid-state pressure sensors , 1982, IEEE Transactions on Electron Devices.
[33] D. Barbier,et al. Design of a polysilicon-on-insulator pressure sensor with original polysilicon layout for harsh environment , 2003 .
[34] K. Najafi,et al. Characterization of low-temperature wafer bonding using thin-film parylene , 2005, Journal of Microelectromechanical Systems.
[35] D. Czaplewski,et al. LOW TEMPERATURE NAFION BONDING OF SILICON WAFERS , 1999 .
[36] Wilfried Mokwa,et al. CMOS-compatible capacitive high temperature pressure sensors , 2000 .
[37] P. Sarro,et al. Fabrication of a CMOS compatible pressure sensor for harsh environments , 2004 .
[38] M. Chiao,et al. Device-level hermetic packaging of microresonators by RTP aluminum-to-nitride bonding , 2006, Journal of Microelectromechanical Systems.
[39] J. J. Licari,et al. Coating materials for electronic applications : polymers, processes, reliability, testing , 2003 .
[40] N. Najafi,et al. Long-term evaluation of hermetically glass frit sealed silicon to Pyrex wafers with feedthroughs , 2005 .
[41] R. Knechtel. Glass frit bonding: an universal technology for wafer level encapsulation and packaging , 2005 .
[42] Wolfgang R. Fahrner,et al. Review on materials, microsensors, systems and devices for high-temperature and harsh-environment applications , 2001, IEEE Trans. Ind. Electron..
[43] S. Bhansali,et al. Piezoresistive MEMS pressure sensor and packaging for harsh oceanic environment , 2004, 2004 Proceedings. 54th Electronic Components and Technology Conference (IEEE Cat. No.04CH37546).
[44] Karsten Dyrbye,et al. Packaging of physical sensors for aggressive media applications , 1996 .
[45] J. Meindl,et al. A monolithic capacitive pressure sensor with pulse-period output , 1980, 1980 IEEE International Solid-State Circuits Conference. Digest of Technical Papers.
[46] W. S. Czarnocki. Media-isolated sensor , 1998 .
[47] A. Ettouhami,et al. A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response , 2004 .
[48] K. Wise,et al. Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors , 1979, IEEE Transactions on Electron Devices.
[49] K. Moon,et al. Wafer bonding using microwave heating of parylene intermediate layers , 2004 .
[50] A Compact Chemical-Resistant Microvalve Array Using Parylene Membrane and Pneumatic Actuation , 2004 .
[51] Wilfried Mokwa,et al. Capacitive pressure sensor with monolithically integrated CMOS readout circuit for high temperature applications , 2002 .
[52] Masayoshi Esashi,et al. Anodic bonding for integrated capacitive sensors , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.
[53] D. M. Wiles,et al. The thermal stability of poly(aryl-ether–ether-ketone) as assessed by thermogravimetry† , 1989 .
[54] S. Brida,et al. Design of bossed silicon membranes for high sensitivity microphone applications , 2007 .
[55] Kensall D. Wise,et al. Batch-processed vacuum-sealed capacitive pressure sensors , 2001 .