Novel Gallium Complexes with Malonic Diester Anions as Molecular Precursors for the MOCVD of Ga2O3 Thin Films
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Ke Xu | Roland A. Fischer | Anjana Devi | Alberto Gasparotto | D. Barreca | A. Gasparotto | A. Devi | R. Fischer | E. Tondello | Ke Xu | M. Winter | Davide Barreca | Eugenio Tondello | Manuela Winter | Malte Hellwig | M. Hellwig
[1] L. Niinistö,et al. Growth of gallium oxide thin films from gallium acetylacetonate by atomic layer epitaxy , 1996 .
[2] S. Shivashankar,et al. Precursor chemistry for TiO2: titanium complexes with a mixed nitrogen/oxygen ligand sphere. , 2006, Dalton transactions.
[3] Yoshinori Hatanaka,et al. Ga2O3 thin film for oxygen sensor at high temperature , 2001 .
[4] Yoshinori Hatanaka,et al. Ga2O3 thin films for high-temperature gas sensors , 1999 .
[5] Jiarui Liu,et al. Synthesis of aluminium and gallium fluoroalkoxide compounds and the low pressure metal-organic chemical vapor deposition of gallium oxide films , 1999 .
[6] Growth of Ga2O3 thin films on Si(100) substrates using a trimethylgallium and oxygen mixture , 2004 .
[7] Y. Hatanaka,et al. Presumption and improvement for gallium oxide thin film of high temperature oxygen sensors , 2003 .
[8] F. McLafferty. Mass Spectrometric Analysis. Rearrangements in Vinyl Derivatives , 1959 .
[9] H. Ohta,et al. Preparation of highly conductive, deep ultraviolet transparent β-Ga2O3 thin film at low deposition temperatures , 2002 .
[10] J. Woods,et al. Some electrical properties of the semiconductor βGa2O3 , 1966 .
[11] Claus-Dieter Kohl,et al. CO-SENSOR FOR DOMESTIC USE BASED ON HIGH TEMPERATURE STABLE GA2O3 THIN FILMS , 1998 .
[12] R. Bertoncello,et al. Chemical vapour deposition and characterization of gallium oxide thin films , 1996 .
[13] K. E. Lawson. The infrared absorption spectra of metal acetylacetonates , 1961 .
[14] Ki-Seok An,et al. Chemical Vapor Deposition of Ga2O3 Thin Films on Si Substrates , 2002 .
[15] Ki-Seok An,et al. Chemical Vapor Deposition of Ga₂O₃ Thin Films on Si Substrates , 2001 .
[16] R. Waser,et al. LI-MOCVD of HfO2 thin films using engineered amide based Hf precursors , 2007 .
[17] J. Janek,et al. A chemically driven insulator-metal transition in non-stoichiometric and amorphous gallium oxide. , 2008, Nature materials.
[18] H. Meixner,et al. Electrical doping of gassensitive, semiconducting Ga2O3 thin films , 1996 .
[19] R. Binions,et al. Gallium oxide thin films from the AACVD of [Ga(NMe2)3]2 and donor functionalised alcohols. , 2008, Dalton transactions.
[20] F. McLafferty,et al. Mass Spectrometric Analysis. Spectral Data File Utilizing Machine Filing and Manual Searching , 1959 .
[21] Takayoshi Oshima,et al. Surface morphology of homoepitaxial -Ga 2O 3 thin films grown by molecular beam epitaxy , 2008 .
[22] Wojtek Wlodarski,et al. Investigation of the oxygen gas sensing performance of Ga2O3 thin films with different dopants , 2003 .
[23] Claire J. Carmalt,et al. A comparison of the gas sensing properties of solid state metal oxide semiconductor gas sensors produced by atmospheric pressure chemical vapour deposition and screen printing , 2006 .
[24] M. Valet,et al. Synthesis of Homoleptic Gallium Alkoxide Complexes and the Chemical Vapor Deposition of Gallium Oxide Films , 2001 .
[25] J. Hao,et al. Electroluminescence of europium-doped gallium oxide thin films , 2004 .
[26] J. Muth,et al. Optical characterization of Eu-doped β-Ga2O3 thin films , 2006 .
[27] T. C. Mcgill,et al. Deposition of Ga2O3–x ultrathin films on GaAs by e-beam evaporation , 2002 .
[28] J. Schoonman,et al. Electrical properties of β-Ga2O3 single crystals. II , 1978 .
[29] J. Muth,et al. Bright, low voltage europium doped gallium oxide thin film electroluminescent devices , 2008 .
[30] R. Waser,et al. Mixed amide–malonate compound of hafnium as a novel monomeric precursor for MOCVD of HfO2 thin films , 2006 .
[31] Nam Ho Kim,et al. Annealing effects on the properties of Ga2O3 thin films grown on sapphire by the metal organic chemical vapor deposition , 2004 .
[32] L. Hubert-Pfalzgraf,et al. Synthesis and characterization of hafnium tert-butylacetoacetate as new MOCVD precursor for HfO2 films , 2005 .
[33] Hyoun-woo Kim,et al. Amorphous gallium oxide nanowires synthesized by metalorganic chemical vapor deposition , 2004 .
[34] C. Carmalt,et al. Synthesis of group 13 sesquialkoxides and their application as precursors to crystalline oxide films , 2007 .
[35] Maximilian Fleischer,et al. Gallium oxide thin films: A new material for high-temperature oxygen sensors , 1991 .
[36] C. Djordjevic. Metal-oxygen vibration modes in the infra-red spectra of aluminium, gallium and indium tris-acetylacetonates , 1961 .
[37] L. McElwee‐White,et al. MOCVD of tungsten nitride (WNx) thin films from the imido complex Cl4(CH3CN)W(NiPr) , 2003 .
[38] Y. Horikoshi,et al. High resolution X-ray photoelectron spectroscopy of beta gallium oxide films deposited by ultra high vacuum radio frequency magnetron sputtering , 2008 .
[39] G. J. Palenik,et al. Tris(acetylacetonato)gallium(III) , 1974 .
[40] T. Harwig,et al. Some observations on the photoluminescence of doped β-galliumsesquioxide , 1978 .
[41] A. Devi,et al. A Study of Bisazido(dimethylamino‐propyl)gallium as a Precursor for the OMVPE of Gallium Nitride Thin Films in a Cold‐Wall Reactor System under Reduced Pressure , 2000 .
[42] C. Winter,et al. Terminal and Bridging Imido Complexes from Titanium Tetrachloride and Primary Amines. Implications for the Chemical Vapor Deposition of Titanium Nitride Films , 1994 .
[43] S. Yoon,et al. Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD) , 2006 .
[44] Minghwei Hong,et al. Optical properties of gallium oxide thin films , 2002 .
[45] Hyoun-woo Kim,et al. Influence of postdeposition annealing on the properties of Ga2O3 films on SiO2 substrates , 2005 .
[46] Jesse J. Brown,et al. Self‐Activated Luminescence of β ‐ Ga2 O 3 , 1969 .
[47] Emily S. Peters,et al. Molecular precursors to gallium oxide thin films. , 2004, Dalton transactions.
[48] W. Stickle,et al. Handbook of X-Ray Photoelectron Spectroscopy , 1992 .
[49] C. Carmalt,et al. Syntheses, X-ray structures and CVD studies of diorganoalkoxogallanes , 2008 .
[50] M. Passlack,et al. Growth and physical properties of Ga2O3 thin films on GaAs(001) substrate by molecular-beam epitaxy , 2003 .
[51] C. Carmalt,et al. Gallium(III) and indium(III) alkoxides and aryloxides , 2006 .
[52] Sudha Singh,et al. A structural study on gallium and indium β-diketonates , 2002 .
[53] H. Shioyama,et al. Metal oxide catalysts for DME steam reforming: Ga2O3 and Ga2O3–Al2O3 catalysts with and without copper , 2005 .