Silicon Micromachining Technology for Passive THz Components

Silicon micromachined terahertz passive components such as silicon washers, waveguide blocks for W-band (75-110 GHz) power amplifiers, and waveguides for 325-500 GHz band have been designed, microfabricated, and characterized. Based on these results, an integrated 600 GHz silicon micromachined RadiometerOn-a-Chip (ROC) has been demonstrated for the first time. It reduced in mass by an order of magnitude compared to the conventional metal machining.