论文信息 - Characterisation of silicon oxynitride thin films and their response to swift heavy-ion irradiation - 字舞流文

Characterisation of silicon oxynitride thin films and their response to swift heavy-ion irradiation

P. Mota‐Santiago | S. Mudie | P. Kluth | C. Notthoff | T. Bierschenk | F. Kremer | A. Nadzri | M. Rodríguez | C. Canto