Gas sensor response of pure and activated WO3 nanoparticle films made by advanced reactive gas deposition

Abstract Pure and activated (doped) nanocrystalline WO 3 films, produced by advanced reactive gas deposition, were investigated for gas sensing applications. Activation took place by co-evaporation of Al or Au with tungsten oxide as the particles were produced. Structural characterization of the films was performed by electron microscopy and X-ray diffractometry. Sensitivity, response time, and recovery time of the sensors were systematically investigated as a function of annealing and operating temperature, using H 2 S, CO, and NO 2 as test gases. The sensitivity was found to lie below and around the ppm level for H 2 S and NO 2 , respectively.

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