Reconfigurable RF Circuits and RF‐MEMS

The twelfth chapter, Reconfigurable RF Circuits and RF-MEMS, was contributed by Robert Malmqvist from Swedish Defence Research Agency (FOI) and Uppsala University, Sweden, Aziz Ouacha from FOI, Sweden, Mehmet Kaynak from IHP GmbH, Frankfurt (Oder), Germany, Naveed Ahsan Linkoping University, Sweden, and Joachim Oberhammer from KTH Royal Institute of Technology, Stockholm, Sweden. While most of today's RF circuits are designed for a specific (fixed) function and frequency range, a much higher degree of flexibility would be possible using highly reconfigurable circuit implementations and front-ends architectures. This chapter presents examples of reconfigurable RF circuits that have been realised using either fully transistor based solutions or by employing RF MicroElectroMechanical Systems (RF-MEMS). First a novel approach for implementing reconfigurable circuitry based on the concept of Programmable Microwave Function Arrays (PROMFA) is presented. Various reconfigurable circuit designs based on the emergence of high performance RF-MEMS switches being developed in GaAs, GaN and SiGe RFIC/MMIC process technologies are then reviewed. In the final section, an overview of state-of-the-art RF-MEMS based phase shifter designs intended for electronic beam-steering antennas and phased array systems is presented.

[1]  Gabriel M. Rebeiz,et al.  Steady state thermal analysis and high-power reliability considerations of RF MEMS capacitive switches , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).

[2]  W. Simon,et al.  Reconfigurable wideband LNAs using ohmic contact and capacitive RF-MEMS switching circuits , 2011, 2011 6th European Microwave Integrated Circuit Conference.

[3]  J. Oberhammer,et al.  Binary-Coded 4.25-bit $W$-Band Monocrystalline–Silicon MEMS Multistage Dielectric-Block Phase Shifters , 2009, IEEE Transactions on Microwave Theory and Techniques.

[4]  Andreas Gustafsson,et al.  Monolithic integration of millimeter-wave RF-MEMS switch circuits and LNAs using a GaAs MMIC foundry process technology , 2011, 2011 IEEE MTT-S International Microwave Workshop Series on Millimeter Wave Integration Technologies.

[5]  Joachim Becker,et al.  A continuous-time field programmable analog array (FPAA) consisting of digitally reconfigurable G/sub M/-cells , 2004, 2004 IEEE International Symposium on Circuits and Systems (IEEE Cat. No.04CH37512).

[6]  Joachim Becker,et al.  A rapid prototyping environment for high-speed reconfigurable analog signal processing , 2008, 2008 IEEE International Symposium on Parallel and Distributed Processing.

[7]  B. Lakshminarayanan,et al.  Optimization and Implementation of Impedance-Matched True-Time-Delay Phase Shifters on Quartz Substrate , 2007, IEEE Transactions on Microwave Theory and Techniques.

[8]  J.B. Hacker,et al.  A monolithic MEMS switched dual-path power amplifier , 2001, IEEE Microwave and Wireless Components Letters.

[9]  U. Prechtel,et al.  RF-MEMS Switch and Phase Shifter Optimized for W-Band , 2008, 2008 38th European Microwave Conference.

[10]  Elliott R. Brown,et al.  RF-MEMS switches for reconfigurable integrated circuits , 1998 .

[11]  C. Samuelsson,et al.  RF MEMS and GaAs Based Reconfigurable RF Front-End Components for Wide-Band Multi-Functional Phased Arrays , 2006, 2006 European Radar Conference.

[12]  C. Samuelsson,et al.  Programmable microwave function array, PROMFA , 2006, 2006 Asia-Pacific Microwave Conference.

[13]  N Somjit,et al.  Power Handling Analysis of High-Power $W$ -Band All-Silicon MEMS Phase Shifters , 2011, IEEE Transactions on Electron Devices.

[14]  Joachim Becker,et al.  Synthesis of analog filters on an evolvable hardware platform using a genetic algorithm , 2007, GECCO '07.

[15]  Lawrence E. Larson,et al.  Microactuators for GaAs-based microwave integrated circuits , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[16]  M.B. Steer,et al.  A reconfigurable bandpass filter for RF/microwave multifunctional systems , 2005, IEEE Transactions on Microwave Theory and Techniques.

[17]  R. Plana,et al.  Thermal analysis of RF-MEMS switches for power handling front-end , 2005, 2005 European Microwave Conference.

[18]  Raafat R. Mansour,et al.  Reconfigurable amplifier with tunable impedance matching networks based on CMOS-MEMS capacitors in 0.18-µm CMOS technology , 2009 .

[19]  J. Rizk,et al.  W-band microstrip RF-MEMS switches and phase shifters , 2003, IEEE MTT-S International Microwave Symposium Digest, 2003.

[20]  Beomsup Kim,et al.  A low-phase-noise CMOS LC oscillator with a ring structure , 2000 .

[21]  J.F. DeNatale,et al.  Monolithic GaAs PHEMT MMICs integrated with RF MEMS switches , 2004, IEEE Compound Semiconductor Integrated Circuit Symposium, 2004..

[22]  S. Lavanga,et al.  New fabrication process to manufacture RF-MEMS and HEMT on GaN/Si substrate , 2009, 2009 European Microwave Integrated Circuits Conference (EuMIC).

[23]  C. Svensson,et al.  A tuned, inductorless, recursive filter LNA in CMOS , 2002, Proceedings of the 28th European Solid-State Circuits Conference.

[24]  Maurits Ortmanns,et al.  A Continuous-Time Hexagonal Field-Programmable Analog Array in 0.13μm CMOS with 186MHz GBW , 2008, 2008 IEEE International Solid-State Circuits Conference - Digest of Technical Papers.

[25]  Tamal Mukherjee,et al.  RF-CMOS-MEMS based frequency-reconfigurable amplifiers , 2009, 2009 IEEE Custom Integrated Circuits Conference.

[26]  Yuji Kasai,et al.  Initial Evaluation of an Evolvable Microwave Circuit , 2000, ICES.

[27]  Maurits Ortmanns,et al.  A hexagonal Field Programmable Analog Array consisting of 55 digitally tunable OTAs , 2008, 2008 IEEE International Symposium on Circuits and Systems.

[28]  J. Schobel,et al.  Millimeter-wave microelectromechanical (MEMS) switches for automotive surround sensing systems , 2003, 2003 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, 2003. Digest of Papers..

[29]  H. Okazaki,et al.  A Novel Compact Reconfigurable Quad-band Power Amplifier Employing RF-MEMS Switches , 2006, 2006 European Microwave Conference.

[30]  J. Turtle,et al.  MEMS Electronically Steerable Antennas for Fire Control Radars , 2007, 2007 IEEE Radar Conference.

[31]  P. Sen,et al.  Reconfigurable RFICs in Si-based technologies for a compact intelligent RF front-end , 2005, IEEE Transactions on Microwave Theory and Techniques.

[32]  Christer Svensson,et al.  Some limiting factors for the noise optimization of recursive active microwave integrated filters , 1999 .

[33]  C. Wipf,et al.  SiGe HBT technology with fT/fmax of 300GHz/500GHz and 2.0 ps CML gate delay , 2010, 2010 International Electron Devices Meeting.

[34]  Gabriel M. Rebeiz,et al.  RF MEMS switches and switch circuits , 2001 .

[35]  J.J. Yao,et al.  Monolithic GaAs PHEMT MMICs integrated with high performance MEMS microrelays , 1999, 1999 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference.

[36]  Maurits Ortmanns,et al.  A Continuous-Time Field Programmable Analog Array Using Parasitic Capacitance Gm-C Filters , 2007, 2007 IEEE International Symposium on Circuits and Systems.

[37]  E.J. Martinez Transforming MMICs , 2002, 24th Annual Technical Digest Gallium Arsenide Integrated Circuit (GaAs IC) Symposiu.

[38]  Tatsuya Hirose,et al.  K-band CMOS-based power amplifier module with MEMS tunable bandpass filter , 2010, The 5th European Microwave Integrated Circuits Conference.

[39]  Georg Fischer,et al.  RF-MEMS and SiC/GaN as enabling technologies for a reconfigurable multi-band/multi-standard radio , 2003, Bell Labs Technical Journal.

[40]  C. Samuelsson,et al.  Wide-band radio frequency micro electro-mechanical systems switches and switching networks using a gallium arsenide monolithic microwave-integrated circuits foundry process technology , 2011 .

[41]  Gabriel M. Rebeiz,et al.  W-band CPW RF MEMS circuits on quartz substrates , 2003 .

[42]  C. Samuelsson,et al.  RF MEMS based impedance matching networks for tunable multi-band microwave low noise amplifiers , 2009, 2009 International Semiconductor Conference.

[43]  C. Samuelsson,et al.  Applications of Programmable Microwave Function Array (PROMFA) , 2007, 2007 18th European Conference on Circuit Theory and Design.

[44]  Dominique Schreurs,et al.  RF-MEMS based tri-band GaN power amplifier , 2011 .

[45]  M. Kaynak,et al.  BEOL embedded RF-MEMS switch for mm-wave applications , 2009, 2009 IEEE International Electron Devices Meeting (IEDM).

[46]  Imed Zine-El-Abidine,et al.  A monolithic integration of a tunable MEMS capacitor with GaN technology , 2011, 2011 24th Canadian Conference on Electrical and Computer Engineering(CCECE).

[47]  Laurent Dussopt,et al.  A Low-Loss Distributed 2-Bit W-Band MEMS Phase Shifter , 2003, 2003 33rd European Microwave Conference, 2003.

[48]  M. Ortmanns,et al.  A Field-Programmable Analog Array of 55 Digitally Tunable OTAs in a Hexagonal Lattice , 2008, IEEE Journal of Solid-State Circuits.

[49]  James C. M. Hwang,et al.  Dielectric Charging of RF MEMS Capacitive Switches under Bipolar Control-Voltage Waveforms , 2007, IMS 2007.

[50]  R. Molfino,et al.  An intelligently controlled RF power amplifier with a reconfigurable MEMS-varactor tuner , 2005, IEEE Transactions on Microwave Theory and Techniques.

[51]  Gabriel M. Rebeiz,et al.  Optimization of distributed MEMS transmission-line phase shifters-U-band and W-band designs , 2000 .

[52]  J.L. Volakis,et al.  Skin-Effect Self-Heating in Air-Suspended RF MEMS Transmission-Line Structures , 2006, Journal of Microelectromechanical Systems.