Inorganic polarization devices with optical functional layers fabricated by glancing angle deposition technique

The inorganic polarization devices for visible range, namely the absorptive gird polarizers and form birefringent wave plates, were developed. These devices are composed only of inorganic materials and glancing angle deposition technique was employed to fabricate their optical functional layers, which are the absorptive layer and columnar birefringent structure for the polarizers and wave plates, respectively. The optical performance and reliability of these devices were experimentally evaluated and showed them to be suitable for applications requiring high light resistance and thermal durability, such as liquid crystal display projectors.

[1]  Holger Moench,et al.  UHP lamp systems for projection applications , 2005 .

[2]  S. D. Stookey,et al.  Selective polarization of light due to absorption by small elongated silver particles in glass. , 1968, Applied optics.

[3]  Edward A. West,et al.  Polarization errors associated with birefringent waveplates , 1995 .

[4]  Eiji Takahashi,et al.  Low-reflective wire-grid polarizers with absorptive interference overlayers. , 2010, Nanotechnology.

[5]  Koji Sasaki,et al.  Optical properties and microstructures of inorganic wave plates prepared by serial bideposition , 2014 .

[6]  Yasuhiko Takeda,et al.  Simultaneous oblique deposition from opposite azimuthal directions for fabrication of thin film retardation plates , 1996, Other Conferences.

[7]  Qi Hong Wu,et al.  Birefringent Thin Films and Polarizing Elements , 1998 .

[8]  Jianmin Chen,et al.  Polarization engineering for LCD projection , 2005 .

[9]  L. C. Ling,et al.  46.3: An Efficient Illumination System for Single-Pane LCD Projector , 2001 .

[10]  I. Hodgkinson,et al.  Serial bideposition of anisotropic thin films with enhanced linear birefringence. , 1999, Applied Optics.

[11]  Motofumi Suzuki,et al.  Tailoring coupling of light to local plasmons by using Ag nanorods/structured dielectric/mirror sandwiches , 2009 .

[12]  Toh-Ming Lu,et al.  Growth of uniformly aligned nanorod arrays by oblique angle deposition with two-phase substrate rotation , 2004 .

[13]  T. Mori,et al.  Electrical properties of thin Ta2O5films grown by chemical vapor deposition , 1986, 1986 International Electron Devices Meeting.

[14]  Z. Zhao,et al.  Optical properties of a metal island film close to a smooth metal surface. , 1993, Applied optics.

[15]  Yeu-Chuen Huang,et al.  Effect of elliptical birefringence on the measurement of the phase retardation of a quartz wave plate by an optical heterodyne polarimeter , 1997 .

[16]  H. Tamada,et al.  Al wire-grid polarizer using the s-polarization resonance effect at the 0.8-microm-wavelength band. , 1997, Optics letters.

[17]  P. Sciortino,et al.  Monolithically integrated circular polarizers with two-layer nano-gratings fabricated by imprint lithography , 2005 .

[18]  Yasunori Taga,et al.  Integrated Sculptured Thin Films , 2001 .

[19]  H. Urbach,et al.  Wire-grid diffraction gratings used as polarizing beam splitter for visible light and applied in liquid crystal on silicon. , 2005, Optics express.

[20]  T Motohiro,et al.  Thin film retardation plate by oblique deposition. , 1989, Applied optics.

[21]  Yiping Zhao,et al.  Designing nanostructures by glancing angle deposition , 2003, SPIE Optics + Photonics.

[22]  Motofumi Suzuki,et al.  Practical applications of thin films nanostructured by shadowing growth , 2012, Other Conferences.

[23]  Motofumi Suzuki,et al.  Ag nanorod arrays tailored for surface-enhanced Raman imaging in the near-infrared region , 2008, Nanotechnology.

[24]  Satoshi Ohuchi,et al.  Ultra portable LCOS projector with high-performance optical system , 2002, 2002 Digest of Technical Papers. International Conference on Consumer Electronics (IEEE Cat. No.02CH37300).

[25]  S Kawakami,et al.  Light propagation along periodic metal-dielectric layers. , 1983, Applied optics.

[26]  Douglas P. Hansen,et al.  52.3: An Improved Polarizing Beamsplitter LCOS Projection Display Based on Wire-Grid Polarizers , 2001 .