In order to reveal the physical processes taking place within the "μ10" microwave discharge ion thruster, internal plasma diagnosis is indispensable. However, the ability of metallic probes to access microwave plasmas biased at a high voltage is limited from the standpoints of the disturbance created in the electric field and electrical isolation. In this study, the axial density profiles of excited neutral xenon were successfully measured under ion beam acceleration by using a novel laser absorption spectroscopy system. The target of the measurement was metastable Xe I 5p(5)((2)P(0) (3/2))6s[3/2](0) (2) which absorbed a wavelength of 823.16 nm. Signals from laser absorption spectroscopy that swept a single-mode optical fiber probe along the line of sight were differentiated and converted into axial number densities of the metastable neutral particles in the plasma source. These measurements revealed a 10(18) m(-3) order of metastable neutral particles situated in the waveguide, which caused two different modes during the operation of the μ10 thruster. This paper reports a novel spectroscopic measurement system with axial resolution for microwave plasma sources utilizing optical fiber probes.
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